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The paper:”Improving the deployment of inspection; tutorial on inspection capacity and sample planning” describes among other things data analysis to find excursion frequencies and signal to noise ratios. The analysis method used treats the process steps independently. This is the method used so far in this field of science. As of 4/1/06, Sensor Analytics is using a more advanced analysis method that analyzes dependent steps in parallel. Dependent steps are defined as steps processed on the same toolset, e.g. M1 etch and M2 etch. This method can identify excursion signatures that affect multiple steps simultaneously and reduces the risk of double counting excursions.