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Custom projects with Sensor Analytics Metrology and reticle inspection planning As with our other services, the concept of calculating both the costs and benefits apply to the planning of metrology and reticle inspection capacity. Due to the specifics associated with each metrology & reticle inspection operation, we address these as custom projects. Our Inspection Planner software, IP1.0 is used, but custom data analysis is also required. Sensor Analytics consultants have contributed to the pioneering works to date in this area: reference 1, reference 2, reference 3. Economic evaluation of semiconductor manfacturing operations Our tools and methods can be used to quantify the economic impact of various methods, materials, and equipment that affect yield, throughput, cycle-time, or efficiency. A good example is our analysis of the yield impact of AMHS (see the ICP page). A similar approach can be used to quantify the benefit of, for example, quicker root cause analysis capability. General process control decision analysis Behind the semiconductor specific implementations offered by Sensor Analytics lie general purpose algorithms. If process control costs are impacting your bottom line then we can help. Other industrial engineering and operations research services Statistics, probability theory, and discrete event simulation are all tools we use on a regular basis in our services, research, and development. The discrete event simulation model used in our recent research is an example of cutting edge implementation. The c++ compiled simulation of a fab (including the complicated defect excursion and detection mechanism) can process 100K lots through 10 process steps in 30 seconds. This model and our IP1.0 software can, with little or no customization, be applied to, for example, bio manufacturing. The methods of the operations research field are by definition of general nature. Early work by a Sensor Analytics consultant involved throughput analysis of parts assembly with computer vision enabled robots. The research resulted in an award winning publication. Our consultants are active in the operations research field. If you have needs that are better addressed elsewhere, then we can direct you the right way.

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