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Introduction to Inspection Planning Conceptually Inspection Planning is analogous to process tool capacity planning. In practicality, however, the planning of Inspection capacity requires a larger set of variables and data. The fact that a wafer can theoretically yield good chips without any inspection at all brings up the question of how much and where to inspect, i.e. what is the optimal sampling plan? Sensor Analytics’ Inspection planning service provides an answer to this question by considering both the costs and benefits of different sampling plans. The Inspection Planning offered by Sensor Analytics Planning based on total cost To find the optimal inspection capacity it is necessary to balance inspection and excursion costs. Our Inspection Planner software is used to calculate the revenue lost to excursions (out-of-control events). Inspection Planner 1.0 contains state of the art probability models. See the IP1.0 page.   Quicklinks: Typical scope, duration, and tasks Service product sheet (pdf) software used to deliver this service Decision variables affecting excursion costs The overall excursion cost is a function of numerous decision variables. Identifying economic settings for these variables requires understanding of the defect mechanisms inspection is trying to control. Inspection data from the process provides that information.   Examples of decision variables in inspection planning Analysis based on fab defectivity data Parameters derived from defect data are used to model how defect excursions reduce yield. The parameters include: excursion frequencies, excursion yield impacts, excursion signal to noise ratios, lot-to-lot and wafer-to-wafer variances. The sampling plan and Inspection tool capability parameters are then used to model how excursions can be detected. These include (for each sensitivity setting): throughput, capture rate per defect type, MTBF/MTTR, and sampling (percent of lots, wafers, wafer area, & defects to review). Using these parameters, and more, the Inspection Planner software is used to calculate and minimize total cost. To learn about typical scope, duration, and tasks go to: Outline of an Inspection Planning project. Download the product sheet for our Inspection Planning service (pdf). Learn about the software used to deliver this service.

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