Outline of an Inspection Planning Project Project planning Data collection Data analysis Inspection planning & optimization Delivery of results Project planning Project scope can range anywhere from an aggregate analysis of one step to a detailed analysis of a whole fab. Aggregate analysis of a single step could include, for example, two defect types (killer and non-killer defects) and majority of parameter inputs from benchmark data. In contrast, a detailed full fab analysis could include data collection from all inspection steps and modeling of 5+ defect types per step (including their propagation to downstream steps). Resulting project duration can range from 2 to 20 days depending on number of experiments and fab involvement. Sensor Analytics will provide a fixed bid on the project plan. Data collection Considerable amount of inspection data is needed to estimate parameters associated with excursions. However, effective analysis can be done with benchmark and/or previous process data. Other data needed for analysis includes: product types and their design rules, production volume, selling prices, average yields, inspection/process tool counts & types, inspection/process tool throughputs, MTBF/MTTR statistics, defect capture rates, and material handling times. Data analysis Custom analysis methods in the Inspection Planner software are used to estimate in and out of control defect counts, excursion frequencies, wafer-to-wafer and lot-to-lot variance. In absence of fab yield estimates, yield models are used to estimate in and out of control yields. Inspection planning and optimization Calculation of excursion and total cost is done with the Inspection Planner software. Inspection Planner contains an advanced analytic formulation based on probability theory. The formulation allows rapid calculation of high dimensional problems (multiple steps, excursion types, and tools). This allows extensive sensitivity and optimization analysis to be performed. Delivery of results Recommended values for decision variables are delivered along with tables and charts containing inspection and excursion costs for all experiments. Results include the impact inspection has on processing capacity, queue times, and fab cycle-time. Additional deliveries depend on project objectives, examples include return on investment comparison for competing tools, and full fab capacity plans.